Oliver M.R. Chyan

Research

Professor Chyan's research group actively explore underlying fundamental science of selected critical interfaces relevant to advanced microelectronic fabrication and functional nanostructure design/development. Various highly sensitive metrology were developed to characterize metals, semiconductors, oxides, organics and their composites. The improved understanding of fundamental interfacial properties leads to useful functional designs, such as chemical sensors, IC metal interconnects, Cu diffusion barriers, corrosion inhibitors, fuel cells and renewable energy.

Research interests (pdf)